Influence of oxygen on the optical and electrical properties of magnetron-sputtered indium tin oxide thin films at ambient temperature
Alex J. Robb, Zachary A. Duca, Nasiba White, Patrick Woodell, Patrick A. Ward
Topics & Concepts
Indium tin oxideMaterials scienceSheet resistanceThin filmSputter depositionTransmittanceSputteringArgonIndiumTransparent conducting filmOptoelectronicsAnnealing (glass)Cavity magnetronAnalytical Chemistry (journal)Composite materialNanotechnologyChemistryLayer (electronics)Organic chemistryChromatographyZnO doping and propertiesThin-Film Transistor TechnologiesChalcogenide Semiconductor Thin Films