Design, fabrication and test of a bulk SiC MEMS accelerometer
Yanxin Zhai, Haiwang Li, Zhi Tao, Xiaoda Cao, Chunhui Yang, Zhizhao Che, Tiantong Xu
Topics & Concepts
Microelectromechanical systemsFabricationAccelerometerMaterials scienceTest (biology)NanotechnologyOptoelectronicsEngineering physicsComputer scienceEngineeringGeologyOperating systemMedicinePaleontologyPathologyAlternative medicineAdvanced MEMS and NEMS TechnologiesAdvanced Surface Polishing TechniquesAcoustic Wave Resonator Technologies