Ion implantation effects on the characteristics of β-Ga2O3 epilayers grown on sapphire by MOCVD
Ray‐Hua Horng, Apoorva Sood, Fu‐Gow Tarntair, Dong-Sing Wuu, Ching‐Lien Hsiao, Singh Jitendra Pratap
Topics & Concepts
Metalorganic vapour phase epitaxyMaterials scienceSapphireTransmission electron microscopyAnalytical Chemistry (journal)Ion implantationX-ray photoelectron spectroscopyIonChemical vapor depositionScanning electron microscopeElectrical resistivity and conductivityDopingSheet resistanceOptoelectronicsNanotechnologyChemistryEpitaxyNuclear magnetic resonanceOpticsLaserOrganic chemistryChromatographyElectrical engineeringLayer (electronics)Composite materialPhysicsEngineeringGa2O3 and related materialsZnO doping and propertiesSemiconductor materials and devices