Chemical mechanical polishing exploiting metal electrochemical corrosion of single-crystal SiC
Yingrong Luo, Qiang Xiong, Jiabin Lu, Qiusheng Yan, Da Hu
Topics & Concepts
PolishingMaterials scienceX-ray photoelectron spectroscopyCorrosionChemical-mechanical planarizationElectrolyteElectrochemistryMetallurgyScanning electron microscopeSingle crystalSurface roughnessCrystal (programming language)AluminiumCopperMetalChemical engineeringComposite materialElectrodeCrystallographyChemistryPhysical chemistryEngineeringProgramming languageComputer scienceAdvanced Surface Polishing TechniquesSemiconductor materials and devicesDiamond and Carbon-based Materials Research