Enhanced performance of phase change memory by grain size reduction
Yuan Xue, Sannian Song, Xiao-Gang Chen, Shuai Yan, Shilong Lv, Tianjiao Xin, Zhitang Song
Abstract
Phase change memory based on Ta-GST exhibits superior thermal stability and reliability, so it is expected to be used in high-temperature applications.
Topics & Concepts
Materials scienceReduction (mathematics)Grain sizePhase (matter)Phase-change memoryPhase changeNanotechnologyComposite materialEngineering physicsMathematicsEngineeringLayer (electronics)GeometryOrganic chemistryChemistryPhase-change materials and chalcogenidesAdvanced Memory and Neural ComputingChalcogenide Semiconductor Thin Films