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Atmospheric pressure microwave plasma for aluminum surface cleaning

Lucia Bónová, Weikun Zhu, Dhruval Patel, Daniel V. Krogstad, D. N. Ruzic

2020Journal of Vacuum Science & Technology A Vacuum Surfaces and Films21 citationsDOI

Abstract

An atmospheric pressure, 2.45 GHz microwave plasma operating in ambient air was used to clean and activate aluminum surfaces. The effect of processing parameters on surface chemistry of aluminum has been studied to determine the minimal power and time needed to create clean surfaces. The contact angle measurements showed that the hydrophilicity greatly increases with increasing power and decreasing substrate speed. Fourier transform infrared spectroscopy shows that oxidative and thermal degradation is present during the plasma cleaning process. The authors’ system using atmospheric pressure air plasma proves to be an efficient method for cleaning and activating metal surfaces without generating chemical waste and can be used to increase the adhesion of subsequent protective coatings.

Topics & Concepts

Atmospheric pressureAtmospheric-pressure plasmaAluminiumMaterials scienceMicrowavePlasma cleaningPlasmaFourier transform infrared spectroscopySubstrate (aquarium)Plasma processingInfraredThermalNonthermal plasmaAnalytical Chemistry (journal)Chemical engineeringChemistryComposite materialEnvironmental chemistryOpticsEngineeringGeologyQuantum mechanicsMeteorologyOceanographyPhysicsPlasma Applications and DiagnosticsSurface Modification and SuperhydrophobicityPlasma Diagnostics and Applications
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