Effects of orientation on microstructure and mechanical properties of TiN/AlN superlattice films
Yanmeng Chen, Tao Guo, Jiawei Wang, Xiaolu Pang, Lijie Qiao
Topics & Concepts
SuperlatticeMaterials scienceTinMicrostructureHigh-resolution transmission electron microscopyToughnessThin filmComposite materialMetallurgyOptoelectronicsNanotechnologyTransmission electron microscopyMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsAdvanced ceramic materials synthesis