Aluminum nitride surface modification mechanism by laser ultrasonic-assisted grinding
He Zhang, Cong Sun, Yuan Hong, Yansheng Deng, Liang Ma
Topics & Concepts
Materials scienceGrindingAbrasiveSurface roughnessCeramicLaserAluminiumUltrasonic sensorNitrideSurface finishComposite materialMetallurgyOpticsAcousticsPhysicsLayer (electronics)Advanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced Machining and Optimization Techniques