Effect of hafnium addition on structure, wear resistance and high temperature oxidation of MOSx thin films
P.C. Silva Neto, D.A. Ramirez, A.R. Terto, Jonh Yago Erikson Santos, Júlio César Valeriano dos Santos, Fabiana Magalhães Teixeira Mendes, F.L. Serafini, María Cristina Moré Farias, Eduardo Kirinus Tentardini
Topics & Concepts
X-ray photoelectron spectroscopyHafniumMaterials scienceThin filmSputter depositionTribologySputteringAnalytical Chemistry (journal)MetallurgyChemical engineeringChemistryNanotechnologyChromatographyZirconiumEngineeringMetal and Thin Film MechanicsSemiconductor materials and interfacesSemiconductor materials and devices