Single photomask lithography for shape modulation of micropatterns
Sang Hun Lee, Sung Eun Seo, Kyung Ho Kim, Jiyeon Lee, Chul Soon Park, Bong‐Hyun Jun, Seon Joo Park, Oh Seok Kwon
Topics & Concepts
PhotomaskPhotolithographyPhotoresistMaterials scienceLithographyFabricationNanotechnologyComputational lithographyModulation (music)ResistProcess (computing)Multiple patterningComputer scienceOptoelectronicsLayer (electronics)AcousticsPhysicsMedicinePathologyOperating systemAlternative medicineNanofabrication and Lithography TechniquesInnovative Microfluidic and Catalytic Techniques InnovationMicrofluidic and Capillary Electrophoresis Applications