Exploration of photocatalytic chlorination combined simplified distillation to produce electronic grade high-purity trichlorosilane via microchannel reactor experiments, multiphase-flow simulation, ReaxFF MD, and DFT
Ye Wan, Jianhua Liu, Qiuyun Mao, Xin Chang, Ying Song, Zhenjun Yuan, Zihan You, Xiong Zhao, JiaZhuang Tian, Dazhou Yan, Jin Xiao, Qifan Zhong
Topics & Concepts
TrichlorosilaneMicrochannelPhotocatalysisMaterials scienceMicroreactorDistillationChemical engineeringChemistryAnalytical Chemistry (journal)Organic chemistryCatalysisNanotechnologyOptoelectronicsSiliconEngineeringInnovative Microfluidic and Catalytic Techniques InnovationTiO2 Photocatalysis and Solar CellsCatalytic Processes in Materials Science