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Compact low-birefringence polarization beam splitter using vertical-dual-slot waveguides in silicon carbide integrated platforms

Xiaodong Shi, Jingjing Zhang, Weichen Fan, Yaoqin Lu, Nianhua Peng, Karsten Rottwitt, Haiyan Ou

2021Photonics Research44 citationsDOIOpen Access PDF

Abstract

The polarization beam splitter is a key component for polarization manipulation in photonic integrated circuits, but it is challenging to design for low-refractive-index optical materials, due to the low birefringence of the waveguides. We propose what we believe is a novel compact vertical-dual-slot waveguide-based coupling scheme for silicon carbide, enabling efficient low-birefringence polarization splitting by extensively modulating the transverse-magnetic mode distribution. We numerically and experimentally demonstrate the device in the 4H-silicon-carbide-on-insulator integrated platform, with a small footprint of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" id="m1"> <mml:mrow> <mml:mn>2</mml:mn> <mml:mtext>.</mml:mtext> <mml:mn>2</mml:mn> <mml:mtext> </mml:mtext> <mml:mi>μm</mml:mi> <mml:mo>×</mml:mo> <mml:mn>15</mml:mn> <mml:mtext> </mml:mtext> <mml:mi>μm</mml:mi> </mml:mrow> </mml:math> . The device, easy to fabricate via a single lithography process as other components on the chip, exhibits low insertion loss of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" id="m2"> <mml:mrow> <mml:mo form="prefix">&lt;</mml:mo> <mml:mn>0.71</mml:mn> <mml:mtext> </mml:mtext> <mml:mi>dB</mml:mi> </mml:mrow> </mml:math> and <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" id="m3"> <mml:mrow> <mml:mo form="prefix">&lt;</mml:mo> <mml:mn>0.51</mml:mn> <mml:mtext> </mml:mtext> <mml:mi>dB</mml:mi> </mml:mrow> </mml:math> for the transverse-electric and transverse-magnetic polarized light, respectively, and polarization extinction ratio of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline" id="m4"> <mml:mrow> <mml:mo form="prefix">&gt;</mml:mo> <mml:mn>13</mml:mn> <mml:mtext> </mml:mtext> <mml:mi>dB</mml:mi> </mml:mrow> </mml:math> , over 80 nm wavelength range.

Topics & Concepts

Beam splitterOpticsMaterials scienceBirefringenceSilicon carbideOptoelectronicsIntegrated opticsPolarization (electrochemistry)Electron-beam lithographySiliconSplitterSilicon photonicsPhysicsNanotechnologyResistPhysical chemistryLaserLayer (electronics)MetallurgyChemistryPhotonic and Optical DevicesAdvanced Fiber Laser TechnologiesOptical Network Technologies