Damping-enabling technologies for broadband control of piezo-stages: A survey
Zhong Chen, Xineng Zhong, Junjie Shi, Xianmin Zhang
Topics & Concepts
BroadbandPiezoelectricityBandwidth (computing)WaferEngineeringModalLithographyMaterials scienceComputer scienceElectronic engineeringAcousticsElectrical engineeringPhysicsOptoelectronicsTelecommunicationsPolymer chemistryPiezoelectric Actuators and ControlAeroelasticity and Vibration ControlForce Microscopy Techniques and Applications