Hydrogen implantation-induced blistering in diamond: Toward diamond layer transfer by the Smart Cut™ technique
C. Masante, J. de Vecchy, F. Mazen, F. Milesi, L. Di Cioccio, Julien Pernot, Fernando Lloret, D. Araújo, J.C. Pinero, N. Rochat, F. Pierre, Florence Servant, J. Widiez
Topics & Concepts
DiamondAnnealing (glass)Materials scienceWaferMaterial properties of diamondHydrogenMonocrystalline siliconCathodoluminescenceChemical vapor depositionNanotechnologyOptoelectronicsMetallurgyComposite materialSiliconChemistryOrganic chemistryLuminescenceDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesAdvanced Surface Polishing Techniques