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Effects of the oxide/interface traps on the electrical characteristics in Al/Yb2O3/SiO2/n-Si/Al MOS capacitors

Berk Morkoç, Ayşegül Kahraman, Ercan Yılmaz

2021Journal of Materials Science Materials in Electronics18 citationsDOI

Topics & Concepts

Materials scienceAnnealing (glass)DielectricCapacitorAnalytical Chemistry (journal)OxideCapacitanceEquivalent series resistanceForming gasOptoelectronicsComposite materialVoltageElectrical engineeringMetallurgyChemistryElectrodePhysical chemistryEngineeringChromatographySemiconductor materials and devicesAdvanced ceramic materials synthesisSemiconductor materials and interfaces
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