Influence of magnetron sputtering process on the stability of WO3 thin film gas sensor
Chaoqi Zhu, Tao Lv, Huimin Yang, Xiang Li, Xiaoxia Wang, Xiang Guo, Changsheng Xie, Dawen Zeng
Topics & Concepts
SputteringMaterials scienceRepeatabilitySputter depositionThin filmVolumetric flow rateAnalytical Chemistry (journal)Composite materialNanotechnologyChromatographyChemistryQuantum mechanicsPhysicsGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors