Surface analysis of yttrium oxyfluoride deposited via air plasma spraying for Erosion resistance against NF3 plasma
R. Kreethi, Yu-Jin Hwang, Ho-Young Lee, Jae-Hyuk Park, Kee‐Ahn Lee
Topics & Concepts
Materials scienceYttriumCoatingX-ray photoelectron spectroscopyEtching (microfabrication)Atmospheric-pressure plasmaPlasmaMetallurgyCeramicChemical engineeringComposite materialLayer (electronics)EngineeringPhysicsQuantum mechanicsOxidePlasma Diagnostics and ApplicationsMetal and Thin Film MechanicsSurface Modification and Superhydrophobicity