Multilayer heterogeneous electrical insulation structure of HfO2/Al2O3 for high-temperature thin-film sensor on superalloy substrate
Yusen Wang, Congchun Zhang, Shenyong Yang, Yahui Li, Rui Zheng, Bo Huei Yan, Xiangxiang Gao, Nan Zhao, Yunna Sun, Zhuoqing Yang, Guifu Ding
Topics & Concepts
Materials scienceLayer (electronics)Composite materialSubstrate (aquarium)Amorphous solidOptoelectronicsThermal insulationThermal resistanceSuperalloyThermalMicrostructureGeologyPhysicsOceanographyMeteorologyOrganic chemistryChemistryAdvanced Sensor Technologies ResearchMetal and Thin Film MechanicsSemiconductor materials and devices