Silicon-based gallium oxide optical waveguide fabricated by MOCVD
Yu Han, Wei Chen, Teng Jiao, Yu Han, Zhao Zhang, Xin Dong, Yuantao Zhang, Baolin Zhang
Topics & Concepts
Metalorganic vapour phase epitaxyGalliumSiliconOptoelectronicsGallium oxideMaterials scienceOxideWaveguideNanotechnologyLayer (electronics)EpitaxyMetallurgyGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials