Oxygen mediated defect evolution in RF sputtered Ga2O3 thin films on p-Si substrate
Sangita Bhowmick, Rajib Saha, Madhuri Mishra, Ankita Sengupta, Sanatan Chattopadhyay, Subhananda Chakrabarti
Topics & Concepts
Materials scienceOxygenSubstrate (aquarium)Thin filmSputteringOptoelectronicsChemical engineeringNanotechnologyOceanographyGeologyEngineeringChemistryOrganic chemistryGa2O3 and related materialsZnO doping and propertiesElectronic and Structural Properties of Oxides