Characterization of morphological defects related to micropipes in 4H-SiC thick homoepitaxial layers
Junwei Yang, Huaping Song, Jikang Jian, Wenjun Wang, Xiaolong Chen
Topics & Concepts
Materials scienceScanning electron microscopePhotoluminescenceSubstrate (aquarium)Optical microscopeMorphology (biology)Raman spectroscopyCharacterization (materials science)SpectroscopyCathodoluminescenceCrystallographyOptoelectronicsOpticsNanotechnologyChemistryComposite materialLuminescenceGeneticsOceanographyQuantum mechanicsGeologyPhysicsBiologySilicon Carbide Semiconductor TechnologiesElectromagnetic Compatibility and Noise SuppressionSilicon and Solar Cell Technologies