Electrical Performance of Large-Area Y₂O₃ Memristive Crossbar Array With Ultralow C2C Variability

Abstract

Here, we report the electrical performance analysis of a Y <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> -based memristive crossbar array (MCA) of ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$30\,{\times }\,25$ </tex-math></inline-formula> ) on a large Si (100) wafer having a 3-inch diameter by utilizing dual-ion beam sputtering (DIBS) system. The MCA is highly stable and exhibits repeatable and reproducible resistive switching responses in terms of consistent resistive switching voltages ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}_{{\mathrm {SET}}}$ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}_{{\mathrm {RESET}}}$ </tex-math></inline-formula> ). The devices in the MCA efficiently depict the impact of device area scaling on the switching voltage parameters. The fabricated devices also show low device-to-device (D2D) variability in <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}_{{\mathrm {SET}}}$ </tex-math></inline-formula> (2.64%) <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}_{{\mathrm {RESET}}}$ </tex-math></inline-formula> (10.13%) and ultralow cycle-to-cycle (C2C) variability in <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}_{{\mathrm {SET}}}$ </tex-math></inline-formula> (0.2%) and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}_{{\mathrm {RESET}}}$ </tex-math></inline-formula> (1.07%). Furthermore, this work also experimentally probes the impacts of various input signal parameters such as applied voltage, compliance current, and pulsewidth (PW) on the variability parameters.

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