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Investigation of transport processes in a commercial hot wall CVD reactor with multi-substrates for high-quality pyrocarbon deposition

V. M. Shinde, Balamurugan Deivendran, Harish Kumar, N. Eswara Prasad

2021Surface and Coatings Technology15 citationsDOI

Topics & Concepts

Deposition (geology)Materials scienceFlow (mathematics)Volumetric flow rateComputational fluid dynamicsSensitivity (control systems)Chemical vapor depositionSurface (topology)Nuclear engineeringMechanicsChemical engineeringProcess engineeringNanotechnologyPhysicsGeometrySedimentMathematicsEngineeringElectronic engineeringBiologyPaleontologyHigh-Temperature Coating BehaviorsMetal and Thin Film MechanicsFusion materials and technologies
Investigation of transport processes in a commercial hot wall CVD reactor with multi-substrates for high-quality pyrocarbon deposition | Litcius