Investigation of transport processes in a commercial hot wall CVD reactor with multi-substrates for high-quality pyrocarbon deposition
V. M. Shinde, Balamurugan Deivendran, Harish Kumar, N. Eswara Prasad
Topics & Concepts
Deposition (geology)Materials scienceFlow (mathematics)Volumetric flow rateComputational fluid dynamicsSensitivity (control systems)Chemical vapor depositionSurface (topology)Nuclear engineeringMechanicsChemical engineeringProcess engineeringNanotechnologyPhysicsGeometrySedimentMathematicsEngineeringElectronic engineeringBiologyPaleontologyHigh-Temperature Coating BehaviorsMetal and Thin Film MechanicsFusion materials and technologies