Improvement of SiC deposition uniformity in CVD reactor by showerhead with baffle
Qizhong Li, Yixuan Zhang, Baifeng Ji, Song Zhang, Rong Tu
Topics & Concepts
BaffleDeposition (geology)Materials scienceSubstrate (aquarium)Growth rateComposite materialChemical vapor depositionChemistryOptoelectronicsChemical engineeringGeometryGeologyMathematicsEngineeringPaleontologySedimentOceanographySilicon Carbide Semiconductor TechnologiesSilicon and Solar Cell TechnologiesSemiconductor materials and devices