Effects of three-body diamond abrasive polishing on silicon carbide surface based on molecular dynamics simulations
Zhetian Bian, Tinghong Gao, Yue Gao, Bei Wang, Yutao Liu, Quan Xie, Qian Chen, Qingquan Xiao, Yongchao Liang
Topics & Concepts
PolishingAbrasiveMaterials scienceCrystallizationDiamondAnnealing (glass)Silicon carbideDiamond turningCarbideComposite materialMetallurgyChemical engineeringEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics