A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application
Suwei Wang, Jun Wang, Wenhao Li, Yangyang Liu, Jiashun Li, Pinggang Jia
Abstract
In this paper, a high-fineness fiber-optic Fabry-Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber-Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-fineness interference signal is obtained by coating the interface surface with a high-reflection film, so as to simplify the signal demodulation system. The experimental results show that the pressure sensitivity of this sensor is 55.468 nm/MPa, and the temperature coefficient is 0.01859 nm/°C at 25~300 °C. The fiber-optic pressure sensor has the following advantages: high fineness, high temperature tolerance, high consistency and simple demodulation, resulting in a wide application prospect in the field of high-temperature pressure testing.