A micro graphene high temperature sensor with a single Si3N4 protective layer
Chenggang Tang, Simei Zeng, Hao Hong, Yuan Fang, Yuning Li, Yuqiang Wang, Ming‐Qiang Zhu, Jingye Sun, Tao Deng
Topics & Concepts
GrapheneMaterials scienceTemperature coefficientAtmospheric temperature rangeOptoelectronicsLayer (electronics)FabricationHysteresisNanotechnologyComposite materialCondensed matter physicsThermodynamicsPhysicsPathologyMedicineAlternative medicineGraphene research and applicationsThermal properties of materialsGas Sensing Nanomaterials and Sensors