Oblique angle co-deposition of nanocolumnar tungsten thin films with two W sources: Effect of pressure and target current
V. Potin, Houssem Boukhalfa, Nicolas Martin
Topics & Concepts
Materials scienceTungstenMicrostructureThin filmPole figureSputteringTexture (cosmology)Nanocrystalline materialOpticsComposite materialNanotechnologyMetallurgyArtificial intelligenceImage (mathematics)PhysicsComputer scienceOptical Coatings and GratingsPhotonic Crystals and ApplicationsMetal and Thin Film Mechanics