Iron silicides formation on Si (100) and (111) surfaces through theoretical modeling of sputtering and annealing
Ilya V. Chepkasov, Viktor S. Baidyshev, Ekaterina V. Sukhanova, Maxim A. Visotin, P. Süle, Захар И. Попов
Topics & Concepts
SilicideSiliconMaterials scienceEpitaxyAnnealing (glass)Substrate (aquarium)CrystallographySurface diffusionStoichiometryLayer (electronics)Analytical Chemistry (journal)MetallurgyChemical engineeringChemistryNanotechnologyPhysical chemistryAdsorptionChromatographyEngineeringOceanographyGeologySemiconductor materials and interfacesMicrostructure and mechanical propertiesIntermetallics and Advanced Alloy Properties