Structural and optoelectronic characteristics of β-Ga<sub>2</sub>O<sub>3</sub> epitaxial films with Zn alloying and subsequent oxygen annealing
Xuan Sun, Kewei Liu, Xing Chen, Qichao Hou, Zhen Cheng, Jialin Yang, Qiu Ai, Yongxue Zhu, Binghui Li, Lei Liu, Dezhen Shen
Abstract
In this article, we have reported the fabrication of ∼7.5 at% Zn alloyed β-Ga 2 O 3 epitaxial films and their high performance solar-blind photodetectors.
Topics & Concepts
Materials scienceEpitaxyFabricationAnnealing (glass)PhotodetectorOptoelectronicsOxygenMetallurgyNanotechnologyLayer (electronics)PathologyAlternative medicineOrganic chemistryChemistryMedicineGa2O3 and related materialsAdvanced Photocatalysis TechniquesZnO doping and properties