Influence of growth parameters and systematical analysis on 8-inch piezoelectric AlN thin films by magnetron sputtering
Shaocheng Wu, Rongbin Xu, Bingliang Guo, Yinggong Ma, Daquan Yu
Topics & Concepts
Materials scienceFull width at half maximumSputter depositionThin filmPiezoelectricitySubstrate (aquarium)SputteringGrain sizeResidual stressComposite materialStress (linguistics)Grain growthOptoelectronicsNanotechnologyPhilosophyLinguisticsGeologyOceanographyAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsMetal and Thin Film Mechanics