Ultra-Tuning of nonlinear drumhead MEMS resonators by Electro-Thermoelastic buckling
Ali Kanj, Paolo F. Ferrari, Arend M. van der Zande, Alexander F. Vakakis, Sameh Tawfick
Topics & Concepts
StiffeningResonatorBucklingNonlinear systemMicroelectromechanical systemsMaterials scienceThermoelastic dampingStiffnessNatural frequencyAcousticsSofteningStructural engineeringVibrationThermalEngineeringPhysicsOptoelectronicsComposite materialQuantum mechanicsMeteorologyMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator Technologies