Atomic layer deposition coated polymer films with enhanced high-temperature dielectric strength suitable for film capacitors
Xudong Wu, Yichen Liu, Xiaotian Lin, Enling Huang, Guanghui Song, Daniel Q. Tan
Topics & Concepts
Materials scienceAtomic layer depositionComposite materialDielectricCoatingThermal stabilityAmorphous solidPolyetherimideCapacitorPolymerElastic modulusThin filmCapacitanceLayer (electronics)Chemical engineeringNanotechnologyOptoelectronicsElectrodeOrganic chemistryChemistryPhysical chemistryQuantum mechanicsEngineeringVoltagePhysicsSemiconductor materials and devicesDielectric materials and actuatorsFerroelectric and Piezoelectric Materials