FlexDelta: A flexure-based fully decoupled parallel xyz positioning stage with a long stroke
Qianjun Zhang, Wei Dong, Qingsong Xu, Bimal Jeet Goteea, Yongzhuo Gao
Topics & Concepts
StiffnessCoupling (piping)Tracking (education)Stroke (engine)MicrometerComputer scienceNatural frequencyAcousticsStructural engineeringSimulationPhysicsControl theory (sociology)EngineeringMechanical engineeringOpticsVibrationArtificial intelligenceControl (management)PedagogyPsychologyPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsIterative Learning Control Systems