Synthesis and characterization of Al-doped ZnO and Al/F co-doped ZnO thin films prepared by atomic layer deposition
Zbigniew Starowicz, Adam Zięba, Jakub Ostapko, Mateusz Wlazło, Grzegorz Kołodziej, M.J. Szczerba, Grzegorz Putynkowski, Robert P. Socha
Topics & Concepts
Materials scienceDopingThin filmAtomic layer depositionCrystalliteBand gapFluorineAnalytical Chemistry (journal)Electrical resistivity and conductivityChemical engineeringNanotechnologyOptoelectronicsMetallurgyChemistryOrganic chemistryElectrical engineeringEngineeringZnO doping and propertiesGa2O3 and related materialsCopper-based nanomaterials and applications