Significant texture and wear resistance improvement of TiN coatings using pulsed DC magnetron sputtering
Nicholas A. Richter, Bo Yang, James P. Barnard, Tongjun Niu, Xuanyu Sheng, Denis M. Shaw, Makoto Watanabe, Gayatri Rane, U. Krause, Philipp Dürrenfeld, Haiyan Wang, X. Zhang
Topics & Concepts
Pulsed DCMaterials scienceTinMicrostructureTitanium nitrideSputteringSputter depositionAmorphous solidTexture (cosmology)CoatingGrain sizeMetallurgyDirect currentNitrideTitaniumComposite materialThin filmLayer (electronics)VoltageNanotechnologyCrystallographyElectrical engineeringEngineeringImage (mathematics)Computer scienceChemistryArtificial intelligenceMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchPlasma Diagnostics and Applications