Low-temperature open-atmosphere growth of WO<sub>3</sub> thin films with tunable and high-performance photoresponse
Zhuotong Sun, Subhajit Bhattacharjee, Ming Xiao, Weiwei Li, Megan O. Hill, Robert A. Jagt, Louis‐Vincent Delumeau, Kevin P. Musselman, Erwin Reisner, Judith L. MacManus‐Driscoll
Abstract
In-situ orientation tuning of WO 3 thin films with high crystallinity is achieved with a low-temperature and open-atmosphere deposition technique. The fabricated devices showed a significant change in photo-response for film orientation.
Topics & Concepts
Materials scienceCrystallinityAtmosphere (unit)Thin filmDeposition (geology)OptoelectronicsOrientation (vector space)Chemical engineeringNanotechnologyComposite materialMeteorologyGeometryPaleontologyEngineeringBiologyMathematicsSedimentPhysicsTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsZnO doping and properties