Process and characterization of ohmic contacts for beta-phase gallium oxide
Ming‐Hsun Lee, Rebecca L. Peterson
Topics & Concepts
Ohmic contactMaterials scienceContact resistanceGalliumFabricationOxideNanotechnologyOptoelectronicsDopingCharacterization (materials science)Band gapEngineering physicsMetallurgyLayer (electronics)PhysicsPathologyMedicineAlternative medicineGa2O3 and related materialsZnO doping and propertiesElectronic and Structural Properties of Oxides