Effect of the oxygen dependent device parameters on the electrical properties of a-Si-Zn-Sn-O thin film transistors
Akash Kumar, Sang Yeol Lee
Topics & Concepts
Thin-film transistorOxygenMaterials scienceContact resistanceThreshold voltageAmorphous solidSubthreshold slopePartial pressureAnalytical Chemistry (journal)Thin filmElectrodeOxideLayer (electronics)TransistorChemistryNanotechnologyVoltageElectrical engineeringMetallurgyCrystallographyChromatographyPhysical chemistryOrganic chemistryEngineeringThin-Film Transistor TechnologiesSemiconductor materials and devicesElectrical and Thermal Properties of Materials