Wafer-Scale Fabrication of Wearable All-Carbon Nanotube Photodetector Arrays
Peng Liu, Er‐Xiong Ding, Zhenyu Xu, Xiaoqi Cui, Mingde Du, Weijun Zeng, Anastasios Karakassides, Jin Zhang, Qiang Zhang, Faisal Ahmed, Hua Jiang, Pertti Hakonen, Harri Lipsanen, Zhipei Sun, Esko I. Kauppinen
Abstract
High Resolution Image Download MS PowerPoint Slide With electronic devices evolving toward portable and high-performance wearables, the constraints of complex and wet processing technologies become apparent. This study presents a scalable photolithography/chemical-free method for crafting wearable all-carbon nanotube (CNT) photodetector device arrays. Laser-assisted patterning and dry deposition techniques directly assemble gas-phase CNTs into flexible devices without any lithography or lift-off processes. The resulting wafer-scale all-CNT photodetector arrays showcase excellent uniformity, wearability, environmental stability, and notable broadband photoresponse, boasting a high responsivity of 44 AW –1 and a simultaneous detectivity of 1.9 × 10 9 Jones. This research provides an efficient, versatile, and scalable strategy for manufacturing wearable all-CNT device arrays, allowing widespread adoption in wearable optoelectronics and multifunctional sensors.