Unravelling new principles of site-selective doping contrast in the dual-beam focused ion beam/scanning electron microscope
Augustus K. W. Chee
Topics & Concepts
DopantMaterials scienceDopingFocused ion beamScanning electron microscopeElectron beam-induced depositionSecondary electronsAcceleration voltageIon beamSiliconOptoelectronicsAmorphous solidIonAnalytical Chemistry (journal)NanotechnologyCathode rayOpticsElectronBeam (structure)Scanning transmission electron microscopyChemistryComposite materialCrystallographyOrganic chemistryQuantum mechanicsPhysicsChromatographyElectron and X-Ray Spectroscopy TechniquesIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Electron Microscopy Techniques and Applications