New insights on LeTID/BO-LID in p-type mono-crystalline silicon
Dehang Lin, Zechen Hu, Qiyuan He, Deren Yang, Lihui Song, Xuegong Yu
Topics & Concepts
Annealing (glass)SiliconWaferBoronHydrogenCrystalline siliconMaterials scienceDopingOxygenChemical engineeringKineticsDegradation (telecommunications)Analytical Chemistry (journal)ChemistryChemical physicsNanotechnologyComposite materialOptoelectronicsChromatographyComputer scienceOrganic chemistryQuantum mechanicsPhysicsTelecommunicationsEngineeringSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSemiconductor materials and interfaces