Pressure-dependent shape adaptive multi-jet polishing for edge effect restraint
Zili Zhang, Chi Fai Cheung, Jiang Guo, Chunjin Wang
Topics & Concepts
PolishingEnhanced Data Rates for GSM EvolutionMaterials scienceJet (fluid)Chemical-mechanical planarizationComposite materialMechanicsComputer sciencePhysicsComputer visionErosion and Abrasive MachiningAdvanced Surface Polishing TechniquesHigh-Velocity Impact and Material Behavior