Using IoT technology for computer-integrated manufacturing systems in the semiconductor industry
Yuqiang Chen, Biao Zhou, Mingming Zhang, Chien‐Ming Chen
Topics & Concepts
Semiconductor device fabricationComputer scienceRadio-frequency identificationProcess (computing)ScrapVisibilityInternet of ThingsAsset (computer security)Container (type theory)Manufacturing engineeringEmbedded systemEngineeringComputer securityElectrical engineeringOperating systemOpticsMechanical engineeringWaferPhysicsIndustrial Vision Systems and Defect DetectionDigital Transformation in IndustryIoT and Edge/Fog Computing