A novel approach for wafer defect pattern classification based on topological data analysis
Seungchan Ko, Dowan Koo
Topics & Concepts
Computer scienceConvolutional neural networkWaferPattern recognition (psychology)Artificial neural networkProcess (computing)Topology (electrical circuits)Artificial intelligenceData miningMathematicsMaterials scienceCombinatoricsNanotechnologyOperating systemTopological and Geometric Data AnalysisCell Image Analysis TechniquesDigital Image Processing Techniques