Radiation chemistry of a novel zinc–oxo cluster crosslinking strategy for EUV patterning
Youming Si, Danhong Zhou, Jun Zhao, Yifeng Peng, Pengzhong Chen, Jiangli Fan, Xiaojun Peng
Topics & Concepts
Extreme ultraviolet lithographyPhysicsOpticsAdvancements in Photolithography TechniquesNanofabrication and Lithography TechniquesIntegrated Circuits and Semiconductor Failure Analysis