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A review of rare-earth oxide films as high k dielectrics in MOS devices — Commemorating the 100th anniversary of the birth of Academician Guangxian Xu

Shuan Li, Youyu Lin, Siyao Tang, Lili Feng, Xingguo Li

2020Journal of Rare Earths27 citationsDOI

Topics & Concepts

Rare earthDielectricOxideMaterials scienceHigh-κ dielectricDopingOptoelectronicsNanotechnologyGate dielectricEngineering physicsSiliconBand gapSemiconductorMetal gateGate oxideElectrical engineeringMetallurgyTransistorPhysicsEngineeringVoltageSemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesIntegrated Circuits and Semiconductor Failure Analysis
A review of rare-earth oxide films as high k dielectrics in MOS devices — Commemorating the 100th anniversary of the birth of Academician Guangxian Xu | Litcius