A review of rare-earth oxide films as high k dielectrics in MOS devices — Commemorating the 100th anniversary of the birth of Academician Guangxian Xu
Shuan Li, Youyu Lin, Siyao Tang, Lili Feng, Xingguo Li
Topics & Concepts
Rare earthDielectricOxideMaterials scienceHigh-κ dielectricDopingOptoelectronicsNanotechnologyGate dielectricEngineering physicsSiliconBand gapSemiconductorMetal gateGate oxideElectrical engineeringMetallurgyTransistorPhysicsEngineeringVoltageSemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesIntegrated Circuits and Semiconductor Failure Analysis