Chemical Vapor Deposition of Edge-on Oriented 2D Conductive Metal–Organic Framework Thin Films
Myeonggeun Choe, Jin Young Koo, Ina Park, Hiroyoshi Ohtsu, Ji Hoon Shim, Hee Cheul Choi, Sarah S. Park
Abstract
We demonstrated the synthesis of a conductive two-dimensional metal–organic framework (MOF) thin film by single-step all-vapor-phase chemical vapor deposition (CVD). The synthesized large-area thin film of Cu3(C6O6)2 has an edge-on-orientation with high crystallinity. Cu3(C6O6)2 thin film-based microdevices were fabricated by e-beam lithography and had an electrical conductivity of 92.95 S/cm. Synthesis of conductive MOF thin films by the all-vapor-phase CVD will enable fundamental studies of physical properties and may help to accomplish practical applications of conductive MOFs.
Topics & Concepts
Chemical vapor depositionThin filmElectrical conductorChemistryCrystallinityLithographyNanotechnologyCombustion chemical vapor depositionDeposition (geology)ConductivityElectrical resistivity and conductivityChemical engineeringOptoelectronicsCarbon filmMaterials scienceComposite materialOrganic chemistryCrystallographyPhysical chemistrySedimentEngineeringPaleontologyBiologyElectrical engineeringMetal-Organic Frameworks: Synthesis and ApplicationsZnO doping and propertiesMachine Learning in Materials Science