Rapid characterization of nano-scale structures in large-scale ultra-precision surfaces
Wenjun Yang, Xiaojun Liu, Chi Yu Hu, Wenlong Lu, Chen Cheng, Zhenjian Yao, Zili Lei
Topics & Concepts
ProfilometerStylusNanometrologyOpticsMaterials scienceNanometreInterferometrySurface metrologyNanoscopic scaleScale (ratio)Accuracy and precisionAtomic force microscopyMicroscopeMicroscopyInterference microscopyWhite light interferometryDeflection (physics)NanotechnologySurface finishAcousticsPhysicsComposite materialQuantum mechanicsAdvanced Surface Polishing TechniquesAdvanced Measurement and Metrology TechniquesForce Microscopy Techniques and Applications