Growth rate control and phase diagram of wafer-scale Ga2O3 films by MOCVD
Hanchi Xia, Yongtao Yang, Jia Cao, Fan Zhang, Yang Zhang, Zhenping Wu
Topics & Concepts
Metalorganic vapour phase epitaxyWaferMaterials scienceChemical vapor depositionEpitaxyOptoelectronicsSubstrate (aquarium)CrystallinityThin filmNanotechnologyComposite materialLayer (electronics)OceanographyGeologyGa2O3 and related materialsZnO doping and propertiesElectronic and Structural Properties of Oxides